The large-aperture pulse compression grating (PCG) is a critical component in generating an ultra-high-intensity, ultra-short-pulse laser; however, the size of the PCG manufactured by transmission holographic exposure is limited to large-scale high-quality materials. The reflective method is a potential way for solving the size limitation, but there is still no successful precedent due to the lack of scientific specifications and advanced processing technology of exposure mirrors. In this paper, an analytical model is developed to clarify the specifications of components, and advanced processing technology is adopted to control the spatial frequency errors. Hereafter, we have successfully fabricated a multilayer dielectric grating of 200 mm × 150 mm by using an off-axis reflective exposure system with Φ300 mm. This demonstration proves that PCGs can be manufactured by using the reflection holographic exposure method and shows the potential for manufacturing the meter-level gratings used in 100 petawatt class high-power lasers.

Multilayer dielectric gratings (MLDGs) are crucial for pulse compression in picosecond–petawatt laser systems. Bulged nodular defects, embedded in coating stacks during multilayer deposition, influence the lithographic process and performance of the final MLDG products. In this study, the integration of nanosecond laser conditioning (NLC) into different manufacturing stages of MLDGs was proposed for the first time on multilayer dielectric films (MLDFs) and final grating products to improve laser-induced damage performance. The results suggest that the remaining nodular ejection pits introduced by the two protocols exhibit a high nanosecond laser damage resistance, which remains stable when the irradiated laser fluence is more than twice the nanosecond-laser-induced damage threshold (nanosecond-LIDT) of the unconditioned MLDGs. Furthermore, the picosecond-LIDT of the nodular ejection pit conditioned on the MLDFs was approximately 40% higher than that of the nodular defects, and the loss of the grating structure surrounding the nodular defects was avoided. Therefore, NLC is an effective strategy for improving the laser damage resistance of MLDGs.

The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO₂–Al₂O₃ mixture and SiO₂ layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm², which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.

Maximizing the energy-loading performance of gratings is a universal theme in high-energy pulse compression. However, sporadic grating designs strongly restrict the development of high-power laser engineering. This study proposes an all- and mixed-dielectric grating design paradigm for Nd:glass-based pulse compressors. The solution regions are classified according to the line density. High diffraction efficiency solutions are described in more detail based on the dispersion amount and incident angle. Moreover, an energy scaling factor of 7.09 times larger than that of the National Ignition Facility’s Advanced Radiographic Capability (NIF-ARC) is obtained by taking advantage of the low electric field intensity at transverse magnetic polarization and a small incident angle. These results make a pioneering contribution to facilitate future 20–50-petawatt-class ultrafast laser systems.

KDP类晶体是唯一可以满足ICF激光驱动装置通光口径的非线性光学晶体材料。该类晶体采用水溶液生长法生长，易于产生宏观包裹体和微观晶格缺陷，在高功率激光辐照下晶体内部易产生高密度pinpoint损伤现象，这与其他方法生长的晶体只是受限于光学加工的表面损伤问题相比具有明显不同。KDP类晶体内部的缺陷或前驱体诱导激光损伤与晶体切向、激光波长及偏振方向等密切相关，使得应用于ICF激光驱动器中不同光学功能的、来源于同一晶坯的不同晶体元件也表现出损伤性能的差异性，因此其损伤机理非常复杂，迫切需要认识该类晶体的激光损伤机理问题。回顾了上海光学精密机械研究所联合福建物质结构研究所、山东大学等晶体研制单位联合开展的关于KDP类晶体激光诱导损伤特性的研究工作，进行了用于光开关、倍频以及混频等功能的KDP和不同氘含量DKDP晶体的激光损伤研究，指导了晶体生长工艺优化和过程关键因素控制，并对仍存在的问题及解决方案进行了展望，对于高性能KDP类晶体的研制以及在高功率激光系统中的合理应用具有参考价值。